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Photochemical Processing of Electronic Materials

Photochemical Processing of Electronic Materials by Richard B. Jackman,Ian W. Boyd

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Author: Richard B. Jackman,Ian W. Boyd
Book title: Photochemical Processing of Electronic Materials
Category: Engineering & Transportation
Rating: 4.6 / 5
ISBN: 012121740X
ISBN13: 978-0121217402
Pages: 548
Publisher: Academic Press (December 19, 1991)
Language: English
Subcategory: Engineering
Other format: docx doc txt doc

This book reflects the state of the art in the field of photoprocessing. In addition to providing an introduction and review of many key areas of interest, it targets potential future applications of the technique, and realistically discusses problems that have yet to be solved. The individual chapters have been written by internationally recognized experts and the combination provides a unique and knowledgeable text. Although the basic scientific fundamentals are briefly addressed, the volume concentrates strongly on applications and as such should appeal to applied research scientists as well as students and engineers in the field, and those in managerial or funding positions in technology. Topics include:UV lens designLaser lithographyPhotonucleationExcimer laser developmentProcessors for direct writingLaser ablation (polymers and superconductors)Laser doping, etching, deposition, and growth

Photochemical Processing of Electronic Materials by Richard B. Jackman,Ian W. Boyd pdf, epub, fb2